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Title |
Assistant Professor |
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Researcher Number(JSPS Kakenhi) |
30570618 |
OKADA Tatsuya
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Current Affiliation Organization 【 display / non-display 】
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Duty University of the Ryukyus Faculty of Engineering School of Engineering_Electronic and Communication Engineering Program Assistant Professor
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Concurrently University of the Ryukyus Graduate School of Engineering and Science Electronic Systems and Devices Assistant Professor
Academic degree 【 display / non-display 】
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Hiroshima University - Doctor of Philosophy (Engineering)
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Hiroshima University - Master of Engineering
External Career 【 display / non-display 】
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2009.04
University of the Ryukyus, Faculty of Engineering, Electrical and Electronics Engineering, Electronics and Electronic Materials,
Affiliated academic organizations 【 display / non-display 】
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2005.01-Now
The Japan Society of Applied Physics
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2009.11-Now
The Institute of Electronics, Information and Communication Engieers
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2012.09-Now
The Society for Information Display
Research Interests 【 display / non-display 】
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Thin Film Semiconductor,Rapid Thermal Annealing
Research Areas 【 display / non-display 】
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Nanotechnology/Materials / Thin film/surface and interfacial physical properties
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Manufacturing Technology (Mechanical Engineering, Electrical and Electronic Engineering, Chemical Engineering) / Electron device and electronic equipment
Published Papers 【 display / non-display 】
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Annealing Manufacturing Method Using Continuous Blue WBC (Wavelength Beam Combining) Technique
M. Hishida, N. Kobata, K. Miyano, M. Nobuaki, T. Okada, and T. Noguchi
Materials 17 5399-1 - 5399-12 2024.11 [ Peer Review Accepted ]
Type of publication: Research paper (scientific journal)
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Access this article
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Crystallization of a-Si films deposited by RF sputtering using blue direct diode laser
M. Hishida, N. Kobata, K. Miyano, M. Nobuoka, T. Okada, and T. Noguchi
Photonics West 2023.01 [ Peer Review Accepted ]
Type of publication: Research paper (international conference proceedings)
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High mobility of (111)-oriented large-domain (>100 μm) poly-InSb on glass by rapid-thermal crystallization of sputter-deposited films
T. Kajiwara, O. Shimoda, T. Okada, C. J. Koswaththage, T. Noguchi, and T. Sadoh
Journal of Applied Physics 132 ( 14 ) 145302-1 - 145302-6 2022.10 [ Peer Review Accepted ]
Type of publication: Research paper (scientific journal)
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Access this article
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Formation of High-Mobility InSb Films on Glass by Sputtering and Rapid-Thermal Annealing
T. Kajiwara, O. Shimoda, T. Okada, C. J. Koswaththage, T. Noguchi, and T. Sadoh
International Conference on Solid State Devices and Materials 2022.09 [ Peer Review Accepted ]
Type of publication: Research paper (international conference proceedings)
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Crystallization of SiN Capped InSb Films on Glass by Rapid Thermal Annealing
O. Shimoda, Y. Sawama, C. J. Koswaththage, T. Noguchi, T. Kajiwara, T. Sadoh, and T. Okada
The 21st International Meeting on Information Display 396 - 396 2021.08 [ Peer Review Accepted ]
Type of publication: Research paper (international conference proceedings)
Presentations 【 display / non-display 】
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Metal Source/Drain Structure TFTs using poly-Si Crystallized by Blue Multi-Laser Diode Annealing
T. Okada, and T. Noguchi
19th International Thin-Film Transistor Conference (Nara, Japan, March 24 - 26, 2025) 2025.03 - 2025.03
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Crystallization of InSb Films Deposited by RF Sputtering on Polyimide using RTA
T. Higa, S. Oku, T. Noguchi, T. Kajiwara, T. Sadoh, and T. Okada
The 72nd JSAP Spring Meeting (Noda Campus, Tokyo University of Science & Online, March 14-17, 2025) p.11_244 [17a-K103-11]. 2025.03 - 2025.03
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Thickness Effect on Crystallization by Rapid Thermal Annealing of Sputtered InSb Films Deposited on Glass Using Ne
S. Oku, T. Higa, T. Noguchi, T. Kajiwara, T. Sadoh, and T. Okada
The 72nd JSAP Spring Meeting (Noda Campus, Tokyo University of Science & Online, March 14-17, 2025) p.11_243 [17a-K103-10]. 2025.03 - 2025.03
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Effect of SiO2 capping on RTA crystallization of InSb thin films deposited by RF sputtering using Ne
S. Oku, and T. Okada
Proceedings of 2024 Conference of IEEJ in Okinawa (University of the Ryukyus, December 14, 2024) pp.24-26 [OKI-2024-06]. 2024.12 - 2024.12
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Crystallization of a-Si Films Deposited by CVD using Blue Direct Diode Laser
T. Okada, T. Noguchi, M. Hishida, K. Miyano, N. Kobata, and M. Nobuoka
The 85th JSAP Autumn Meeting (TOKI MESSE and adjoining facilities & online, September 16-20, 2024) p.12_025 [16p-B1-4]. 2024.09 - 2024.09